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发明名称
SPUTTERED DIELECTRIC THIN FILMS
摘要
申请公布号
GB1496590(A)
申请公布日期
1977.12.30
申请号
GB19750050078
申请日期
1975.12.05
申请人
BELL NORTHERN RES LTD
发明人
分类号
C03C17/22;C03C17/09;C23C14/00;C23C14/06;C23C14/34;G02B5/28;H01L49/02;(IPC1-7):C23C15/00
主分类号
C03C17/22
代理机构
代理人
主权项
地址
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