| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a quartz chamber, for a semiconductor manufacturing apparatus, which realizes an adhesive part which can make an O-ring long-lived. SOLUTION: The figure shows the adhesive part of the flange face of the quartz chamber 13 which uses the O-ring 10 to an installation base 11. A groove 12 is formed on the installation base 11 in order to fix the O-ring 10. A step part 14, which protects at least the inside part of the O-ring 10, is formed on the side of the flange face of the quartz chamber 13. The quartz chamber 13 is constituted, in such a way that when the inside of the quartz chamber is set to low-pressure conditions, the separation distance between the chamber-side flange face 131 of the quartz chamber 13 and the installation base 11 is nearly eliminated by the step part 14.</p> |
