SMALL-SIZED TIME OF FLIGHT TYPE SECONDARY ION MASS SPECTROMETER

摘要

PROBLEM TO BE SOLVED: To provide a small-sized time of flight type secondary ion mass spectrometer which can surely measure so-called light element of not more than mass number 16. SOLUTION: In the small-sized time of flight type secondary ion mass spectrometer wherein accelerated primary ions 2 are irradiated on a sample surface 6a and the secondary ions 3 discharged from the sample surface 6a is made to fly in a detector 4 direction by applying a pulse voltage on an accelerating electrode 8, the application of pulse voltage against the accelerating electrode 8 is made to be carried out at an earlier time point than that when the irradiation of the primary ions 2 is completed.