MANOVER- OCH REGLERANORDNING FOR EN MEMBRANVENTIL

摘要

A metal diaphragm valve including a multiple ply metal diaphragm structure comprised of a plurality of thin circular metal elements each having a planar annular rim surrounding a dome-shaped interior portion superimposed one on top of another with their annular rims fixed together to seal the hollow interior portion of a valve bonnet. A diaphragm contacting surface including at least two areas of different degrees of curvature, one of which is cruciform in shape, is mounted for axial movement in the valve bonnet. A method of making the metal diaphragm structure and a hermetically sealed valve assembly are also disclosed.