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发明名称
ULTRASONIC VIBRATOR
摘要
申请公布号
JPS52155089(A)
申请公布日期
1977.12.23
申请号
JP19770064001
申请日期
1977.06.02
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
YOKOYAMA KATSUNORI;YOSHIDA TAKASHI
分类号
B05B17/06;B06B1/06;F24F6/12;H01L41/00;H04R17/00
主分类号
B05B17/06
代理机构
代理人
主权项
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