DEVICE FOR HIGH PRESSURE OXIDATION DIFFUSION FOR SEMICONDUCTOR,申请号JP19760092284-传众专利搜索

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发明名称	DEVICE FOR HIGH PRESSURE OXIDATION DIFFUSION FOR SEMICONDUCTOR
摘要
申请公布号	JPS52155061(A)	申请公布日期	1977.12.23
申请号	JP19760092284	申请日期	1976.08.04
申请人	TEL THERMCO KK	发明人	SATOU RIYOUZOU
分类号	H01L21/31;H01L21/22	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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