Membrane type pressure reducer - with membrane in inert gas enclosure to prevent contamination by gas diffusion through it

摘要

The pressure reducer has a control membrane, esp. one in which it is required to use a thin membrane to increase sensitivity. There is a danger that the permeability of the membrane permits contamination of the gas on the low pressure side owing to diffusion through the membrane. The membrane (10) is enclosed on the side remote from the low pressure section (4) in a chamber (15) which is totally enclosed and filled with an inert gas. The parallel side of the enclosure may be formed by a second identical membrane (11) the two membranes being linked together.