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发明名称
VERFAHREN ZUR HERSTELLUNG VON PHOTOMASKEN
摘要
申请公布号
DE2727190(A1)
申请公布日期
1977.12.22
申请号
DE19772727190
申请日期
1977.06.16
申请人
THOMSON-CSF
发明人
WASSONG,DANIEL
分类号
G03F1/00;G03F1/08;G03F7/20;H01L21/027;(IPC1-7):G03FX/
主分类号
G03F1/00
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代理人
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