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发明名称
ASSEMBLING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS52154352(A)
申请公布日期
1977.12.22
申请号
JP19760071097
申请日期
1976.06.18
申请人
HITACHI LTD
发明人
KAWANOBE TOORU;OKAMURA SHIMUYA
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
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