发明名称 MASK
摘要 PURPOSE:To obtain a mask having fine pores of less than 1 mum dispersed uniformly therein by providing electrode layers on both sides of a dielectric thin film and causing discharge destruction by the application of a voltage having a field strength of more than 10 V/cm.
申请公布号 JPS52153379(A) 申请公布日期 1977.12.20
申请号 JP19760070132 申请日期 1976.06.15
申请人 NIPPON ELECTRIC CO 发明人 SAEKI HIROSHI;TOMINAGA MICHIHIKO
分类号 G03F1/00;G03F1/54;H01L21/027;H01L21/302 主分类号 G03F1/00
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