ELECTRON BEAM RESIST AND ITS USAGE,申请号JP19760071535-传众专利搜索

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发明名称	ELECTRON BEAM RESIST AND ITS USAGE
摘要
申请公布号	JPS52153671(A)	申请公布日期	1977.12.20
申请号	JP19760071535	申请日期	1976.06.16
申请人	MATSUSHITA ELECTRIC IND CO LTD;FUJI YAKUHIN KOGYO KK	发明人	TSUCHIYA SOUJI;MATSUDA SHIYUNSUKE;HONMA MASAMI;NAGAMATSU GENTAROU
分类号	H05K3/00;G03F7/039;H01L21/027	主分类号	H05K3/00
代理机构		代理人
主权项
地址

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