| 发明名称 |
PRODUCTION OF ELECTRIC SUBSTRATE |
| 摘要 |
PURPOSE:To perform the inclined evaporation of a film made of magnetic material such as magnetic tape at high speed by fitting a reflection plate at high temperature in space between an evaporation source and a substrate. |
| 申请公布号 |
JPS52153411(A) |
申请公布日期 |
1977.12.20 |
| 申请号 |
JP19760070552 |
申请日期 |
1976.06.15 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
SHINOHARA KOUICHI |
| 分类号 |
C23C14/00;C23C14/24;G11B5/85 |
主分类号 |
C23C14/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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