发明名称 Method of making an improved superconducting quantum interference device
摘要 An improved superconducting quantum interference device is made by sputtering a thin film of an alloy of three parts niobium to one part tin in a pattern comprising a closed loop with a narrow region, depositing a thin film of a radiation shield such as copper over the niobium-tin, scribing a narrow line in the copper over the narrow region, exposing the structure at the scribed line to radiation and removing the deposited copper.
申请公布号 US4064029(A) 申请公布日期 1977.12.20
申请号 US19770766653 申请日期 1977.02.08
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE UNITED STATES ENERGY RESEARCH AND DEVELOPMENT ADMINISTRATION 发明人 WU, CHENG-TEH;FALCO, CHARLES M.;KAMPWIRTH, ROBERT T.
分类号 G01R33/035;H01L39/24;(IPC1-7):C23C15/00;G01R33/02 主分类号 G01R33/035
代理机构 代理人
主权项
地址