发明名称 |
Method of making an improved superconducting quantum interference device |
摘要 |
An improved superconducting quantum interference device is made by sputtering a thin film of an alloy of three parts niobium to one part tin in a pattern comprising a closed loop with a narrow region, depositing a thin film of a radiation shield such as copper over the niobium-tin, scribing a narrow line in the copper over the narrow region, exposing the structure at the scribed line to radiation and removing the deposited copper.
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申请公布号 |
US4064029(A) |
申请公布日期 |
1977.12.20 |
申请号 |
US19770766653 |
申请日期 |
1977.02.08 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE UNITED STATES ENERGY RESEARCH AND DEVELOPMENT ADMINISTRATION |
发明人 |
WU, CHENG-TEH;FALCO, CHARLES M.;KAMPWIRTH, ROBERT T. |
分类号 |
G01R33/035;H01L39/24;(IPC1-7):C23C15/00;G01R33/02 |
主分类号 |
G01R33/035 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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