发明名称 PRODUCTION OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:Easy removal of a protecting film without using any special solvent, reduction in costs required for the removal and prevention of deposition of silicone dust on electrodes are made possible.</p>
申请公布号 JPS52151560(A) 申请公布日期 1977.12.16
申请号 JP19760069008 申请日期 1976.06.11
申请人 NIPPON ELECTRIC CO 发明人 KACHI MASAO;ASAMI HIROSHI
分类号 H01L21/301;H01L21/78 主分类号 H01L21/301
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