Interferometric thickness measurement system - operates at constant intervals in time period and spatially constant distances in object area

摘要

Interferometric measurement system is for thicknesses or time intervals. The area of the objects (5, 6, 8) to be measured is hit by an exclusively convergent or an exclusively divergent beam of light. An interference line field is produced on the measuring object (5, 6, 8) due to the various path lengths assigned to the single beam directions which continuously imerge into one another. The interference line field is detected on an evaluation plane (11) and is evaluated either by comparison with stored standard patterns or according to a formula which is specified.