| 发明名称 |
REACTION FURNACE APPARATUS FOR VAPOR GROWTH |
| 摘要 |
PURPOSE:To produce a reaction furnace for vapor growth by hermeticaly contacting a joint and tail pipe through the use of a packing or lapping and making the tail pipe relatively rotatable with respect to the joint. |
| 申请公布号 |
JPS52150963(A) |
申请公布日期 |
1977.12.15 |
| 申请号 |
JP19760067679 |
申请日期 |
1976.06.11 |
| 申请人 |
HITACHI LTD |
发明人 |
YASUDA MASAHIKO |
| 分类号 |
C30B25/08;C23C16/44;H01L21/205 |
主分类号 |
C30B25/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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