| 发明名称 |
METHOD FOR FORMING REVERSAL IMAGE AND BLEACHING AGENT USED FOR THIS METHOD |
| 摘要 |
PURPOSE:To simplify a process and obtain stably and safely an image accuracy not inferior to a conventional method, by using a soln. contg. Fe<3+> instead of K2Cr2O7 in manufacture of a photomask by a reversal developing method. |
| 申请公布号 |
JPS52150632(A) |
申请公布日期 |
1977.12.14 |
| 申请号 |
JP19760067481 |
申请日期 |
1976.06.09 |
| 申请人 |
SONY CORP |
发明人 |
ITOU HIROYOSHI;NAKANISHI KON |
| 分类号 |
G03C5/38;G03C5/50;H01L21/027;H01L21/30 |
主分类号 |
G03C5/38 |
| 代理机构 |
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代理人 |
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| 地址 |
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