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发明名称
VERFAHREN ZUR REINIGUNG DER HOCHGLANZPOLIERTEN OBERFLAECHEN VON HALBLEITERSCHEIBEN AUS A HOCH III B HOCH V-VERBINDUNGEN
摘要
申请公布号
DD128830(A3)
申请公布日期
1977.12.14
申请号
DD19750184070
申请日期
1975.02.07
申请人
ZACH,DIETRICH,DL;KALINNA,HELMUT,DL;LOOF,KARIN,DL;RICHTER,LOTHAR,DL
发明人
ZACH,DIETRICH,DL;KALINNA,HELMUT,DL;LOOF,KARIN,DL;RICHTER,LOTHAR,DL
分类号
B08B3/08;C23G5/00;H01L21/30;(IPC1-7):H01L21/30
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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