| 摘要 |
<p>PURPOSE:To solve the deterioration of capacity of the vacuum pump due to the sucked-in gas of solvent, by desorbing by heating the active carbon which has adsorbed the solvent by evacuating with the sealing liquid type vacuum pump using the desorbing solvent of the same kind as the sealing liquid, then recovering the gas of solvent by cooling and using a part of the recovered solvent for the supplementation of the sealing liquid of the vacuum pump.</p> |
