发明名称 |
CAPILLARY FOR BONDING SEMICONDUCTORS |
摘要 |
PURPOSE:To avoid clogging a capillary and thereby make a smooth bonding operation possible by jetting a fluid from the bonding portion of the capillary and its adjacent portion. |
申请公布号 |
JPS52144274(A) |
申请公布日期 |
1977.12.01 |
申请号 |
JP19760060606 |
申请日期 |
1976.05.27 |
申请人 |
|
发明人 |
|
分类号 |
B23K20/00;H01L21/60;H01L21/603 |
主分类号 |
B23K20/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|