发明名称 VACUUM EVAPORATION
摘要 PURPOSE:To generate the corona discharge and to perform the vacuum evaporation while conferring the directional property to the vaporizing substance, by impressing a high voltage of direct (alternate) current between the boat constituted so as to have the electrode of which the electric field intensity becomes larger to the direction of the substrate and the electrostatically shielded substrate, or between the substrate and the electrode.
申请公布号 JPS52144384(A) 申请公布日期 1977.12.01
申请号 JP19760061635 申请日期 1976.05.27
申请人 STANLEY ELECTRIC CO LTD 发明人 TEJIMA TOORU;OINUMA AKIMASA;KATOU KAZUHISA
分类号 C23C14/24;C23C14/32 主分类号 C23C14/24
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