| 发明名称 |
PREPARATION OF SEMICONDUCTOR DEVICE |
| 摘要 |
PURPOSE:To bring a compound semiconductor in contact with the inner wall of a rotating type boat and immerse the compound semiconductor in a saturation solution by rotating the boat, whereby a grown layer is formed on the surface thereof. |
| 申请公布号 |
JPS52144271(A) |
申请公布日期 |
1977.12.01 |
| 申请号 |
JP19760060613 |
申请日期 |
1976.05.27 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
KONNO KAZUTOSHI;AKATSUKA MINORU;KATASE KUNIHIRO |
| 分类号 |
C30B19/00;H01L21/208;H01L33/30 |
主分类号 |
C30B19/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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