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发明名称
摘要
申请公布号
JPS5247301(B2)
申请公布日期
1977.12.01
申请号
JP19740032053
申请日期
1974.03.20
申请人
发明人
分类号
H01L21/301;H01L21/78
主分类号
H01L21/301
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