Microstructure or integrated circuit projector - has microscope in beam path between light source from high press. mercury lamp and microstructure

摘要

Microstructure or integrated circuit projector has microscope in beam path between light source of great luminosity and microstructure. The light emitted by the light source images the microstructures. They guide or reflect the light which is projected onto a screen which is coated with photo-sensitive material. A max. pressure mercury lamp (1) emits light which is thrown via a semi-transmittant mirror (2) and through a microscope (6) onto a microstructure (3). The microscope (6) has interchangeable lenses. The microstructure (3) reflects the light via a deflection mirror (4) onto a projection surface (5) which is covered with photographic material (Y). Thus the microstructure (3) is photographically recorded.