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发明名称
IMPURITY DIFFUSION METHOD FOR SEMICONDUCTOR WAFERS
摘要
申请公布号
JPS52143759(A)
申请公布日期
1977.11.30
申请号
JP19760060037
申请日期
1976.05.26
申请人
HITACHI LTD
发明人
MATSUZAWA MANABU;URIYUU TAKESHI
分类号
H01L21/22;H01L21/31
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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