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发明名称
摘要
申请公布号
JP4421967(B2)
申请公布日期
2010.02.24
申请号
JP20040221998
申请日期
2004.07.29
申请人
发明人
分类号
H01L21/304;B08B3/04;G02F1/13;G02F1/1333;H01L21/306
主分类号
H01L21/304
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代理人
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