Lanthanum hexaboride sintered body, target and lanthanum hexaboride film each comprising same, and process for production of the sintered body

摘要

Disclosed are: a lanthanum hexaboride sintered body which contains lanthanum hexaboride as the main component, has an element nitrogen content of 0.1 to 3 mass % inclusive, contains an impurity composed of element carbon and/or at least two elements selected from La, C, O and B at a content of 0.3 vol % or less, and has a relative density of 88% or more; and a target comprising the lanthanum hexaboride sintered body. An LaB6 sintered body can be provided, which enables the production of a highly pure and dense LaB6 thin film having excellent crystallinity and a good work function and which is suitable for a sputtering target or the like.

主权项

1. A lanthanum hexaboride sintered body comprising:
a nitrogen element; and impurities consisting of carbon alone, at least two kinds of elements selected from the group consisting of La, C, O, and B, or both carbon and the at least two kinds of elements, in a total content of 0.3 volume % or less, wherein a relative density of the sintered body is 88% or more, and a total nitrogen element content in the sintered body is from 0.1 mass % to 3 mass %.