| 发明名称 | Method for making a disk drive head suspension component having a microstructured surface region | ||
| 摘要 | A method for making a disk drive head suspension component having a microstructured surface region includes depositing a layer of photoimageable polymer having an associated set of process parameters including a minimum resolution and exposing the photoimageable polymer through a photomask having a microstructure-producing region with features below the minimum resolution for the photoimageable polymer. The exposed photoimageable polymer is developed to produce a layer of polymer having a thickness and a microstructured surface region with depressions that are less than the thickness of the polymer. | ||
| 申请公布号 | US9361915(B1) | 申请公布日期 | 2016.06.07 |
| 申请号 | US201213690883 | 申请日期 | 2012.11.30 |
| 申请人 | Hutchinson Technology Incorporated | 发明人 | Tobias Kyle T.;LaLonde Lawrence E.;Sydlo Darrell C. |
| 分类号 | G11B5/127;H04R31/00;G11B5/48;G03F7/20;G11B5/84 | 主分类号 | G11B5/127 |
| 代理机构 | Faegre Baker Daniels, LLP | 代理人 | Faegre Baker Daniels, LLP |
| 主权项 | 1. A method for making a disk drive head suspension component having a microstructured surface region, comprising: depositing a layer of photoimageable polymer having an associated set of process parameters including a minimum resolution; exposing the photoimageable polymer through a photomask having a microstructure-producing region with features sized and spaced between about 1 μm and 10 μm and below the minimum resolution for the photoimageable polymer; and developing the exposed photoimageable polymer to produce a layer of polymer having a thickness and a microstructured surface region having depressions that are less than the thickness of the polymer; and curing the developed polymer. | ||
| 地址 | Hutchinson MN US | ||