| 发明名称 |
SEMICONDUCTOR PRODUCTION DEVICE |
| 摘要 |
PURPOSE:To fire wafers at high accuracy and efficiency by eliminating the defects of hot plate system in temperature controlling of the wafers themselves or their handling. |
| 申请公布号 |
JPS52142972(A) |
申请公布日期 |
1977.11.29 |
| 申请号 |
JP19760060373 |
申请日期 |
1976.05.25 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
YASUDA KIYOUMITSU;TORII TAKAHIRO;NUMAJIRI KAZUO;KAI TOSHIHARU |
| 分类号 |
H01L21/677;G03F7/26;H01L21/027;H01L21/66 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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