VERTICAL THIN FILM TRANSISTOR AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a vertical thin film transistor easy in process and advantageous in mass production, and a vertical transistor manufactured by the manufacturing method.SOLUTION: A vertical thin film transistor 200 according to the present invention includes: a substrate 210; two gate electrodes 220 each of which includes a first margin metal layer 2611 formed on the substrate 210 and a second margin metal layer 2621 formed on the first margin metal layer 2611; a first electrode 230 and a second electrode 240 arranged between the two gate electrodes; and a channel layer 250 arranged between the first electrode 230 and the second electrode 240.SELECTED DRAWING: Figure 1