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经营范围
发明名称
OXIDIZING SEMICONDUCTOR
摘要
申请公布号
JPS52141568(A)
申请公布日期
1977.11.25
申请号
JP19770054374
申请日期
1977.05.13
申请人
HITACHI LTD
发明人
KAWAMATA SHIGERU;MIYATA KENJI
分类号
H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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