发明名称 |
ASSIGNING METHOD OF PATTERN INSPECTION AREAS |
摘要 |
PURPOSE:To assign the inspection chips disposed in matrix form with less informations by dividing an inspection area in plural blocks of a rectangle, and setting the position and size of the block in a mask from the number of chips of X, Y axis components based on the origin provided to each block. |
申请公布号 |
JPS52141177(A) |
申请公布日期 |
1977.11.25 |
申请号 |
JP19760056675 |
申请日期 |
1976.05.19 |
申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
HARADA TAKEJI;KIMURA HIROICHI |
分类号 |
G01B11/24;G01N21/956;G03F1/84;H01L21/027;H01L21/302;H01L21/66 |
主分类号 |
G01B11/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|