Control mechanism for fine positioning of substrate discs - has coordinate table with three setting elements, each with specified point of engagement

摘要

In the semiconductor elements production the substrate discs require a fine positioning. This is provided by a control mechanism consisting of a table mounted on a reference plate and shiftable in two mutually orthogonal coordinate directions (x, y) and rotatable in the coordinate plane. The table is engaged directly by three setting elements so arranged that one lies in the x coordinate, while two elements are parallel to the y coordinate. The point of engagement of the x coordinate setting element is located in the intersection point of the two coordinates. The points of engagement of the two parallel setting elements (y coordinate) are located on the x coordinate. Pref. the two parallel setting elements are mounted symmetrically to the y coordinate.