发明名称 POSITIVE RESISTS
摘要 1493089 Imides of methacrylic acid or anhydride polymers INTERNATIONAL BUSINESS MACHINES CORP 31 Aug 1976 [22 Sept 1975] 36044/76 Heading C3P [Also in Division G2] Poly(dimethacrylimide) is prepared by treating poly(methacrylic acid) or poly(methacrylic anhydride) with ammonia while heating at 200‹ C. Poly(N-methyl dimethacrylimide) and poly- (N-ethyl dimethacrylimide) are prepared by a similar process using mono- or dimethyl amine or monoethylamine instead of ammonia. Poly(dimethacrylimide/methyl methacrylate) is prepared by treating poly(methacrylic acid/ methyl methacrylate) with ammonia.
申请公布号 GB1493089(A) 申请公布日期 1977.11.23
申请号 GB19760036044 申请日期 1976.08.31
申请人 IBM CORP 发明人
分类号 G03F7/038;C08F8/32;G03F7/039;H01L21/027 主分类号 G03F7/038
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