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发明名称
CLEANING THE SURFACE OF INSULATOR
摘要
申请公布号
JPS52139995(A)
申请公布日期
1977.11.22
申请号
JP19760057655
申请日期
1976.05.18
申请人
MATSUSHITA ELECTRONICS CORP
发明人
SHINOHARA AKIRA;YAMAMOTO SHIGERU;HOSODA KAZUMI;MIYAMOTO YUUSUKE;BABA KAZUO;HOSOBANE RIYOUSUKE
分类号
B41F17/36;B08B6/00;H01B3/00;H01B17/52;H01C1/04;H01L21/48;H01L23/00
主分类号
B41F17/36
代理机构
代理人
主权项
地址
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