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发明名称
METHOD OF FORMING METAL MEMBRANE
摘要
申请公布号
JPS52138442(A)
申请公布日期
1977.11.18
申请号
JP19760055371
申请日期
1976.05.17
申请人
HITACHI LTD
发明人
HORI YASUMITSU
分类号
H05K3/14;C23C14/58;H01L21/28;H01L21/3205;H01L21/60;H05K3/10
主分类号
H05K3/14
代理机构
代理人
主权项
地址
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