发明名称 Menetelmä ja laite vakuumin stabiloimiseksi ja optimoimiseksi vakuumiprosessissa
摘要 The invention relates to a method and apparatus for stabilizing vacuum in a vacuum process. According to the invention, the method comprising steps: determining a vacuum level; forming vacuum primarily by means of a barometric leg (1); forming vacuum secondly by means of a vacuum pump device (2); and controlling the forming of the vacuum by means of the combination of the barometric leg and vacuum pump device so that the vacuum is adjusted to predetermined level and the vacuum is firstly formed by means of the barometric leg and the vacuum is completed to the predetermined level by means of the vacuum pump device and the vacuum pump device (2) is controlled by means of a frequency converter (4). Further, the invention relates to a use of the method.
申请公布号 FI126207(B) 申请公布日期 2016.08.15
申请号 FI20140005875 申请日期 2014.10.06
申请人 Lappeenrannan teknillinen yliopisto 发明人 Karvonen, Vesa;Ahola, Jero;Häkkinen, Antti
分类号 B01D43/00 主分类号 B01D43/00
代理机构 代理人
主权项
地址