ION IMPLANTATION APPARATUS,申请号GB19760023290-传众专利搜索

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发明名称	ION IMPLANTATION APPARATUS
摘要
申请公布号	GB1492016(A)	申请公布日期	1977.11.16
申请号	GB19760023290	申请日期	1976.06.04
申请人	IBM CORP	发明人
分类号	G21K1/02;H01J37/317;(IPC1-7):H01J3/04	主分类号	G21K1/02
代理机构		代理人
主权项
地址

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