| 发明名称 | Lens module comprising at least one exchangeable optical element | ||
| 摘要 | An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed. | ||
| 申请公布号 | US9423695(B2) | 申请公布日期 | 2016.08.23 |
| 申请号 | US201514605232 | 申请日期 | 2015.01.26 |
| 申请人 | Carl Zeiss SMT GmbH | 发明人 | Soyez Guido;Back Stephan;Buechele Joachim;Kaller Julian;Limbach Guido;Woelfle Harald |
| 分类号 | G02B1/00;G03F7/20;G02B27/00 | 主分类号 | G02B1/00 |
| 代理机构 | Edell, Shapiro & Finnan, LLC | 代理人 | Edell, Shapiro & Finnan, LLC |
| 主权项 | 1. An optical system, comprising: a housing configured with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount; at least one optical element configured to be inserted into and removed from the receiving region through the opening; and at least one gas supply device configured to provide a flow of gas in either or both the opening and the receiving region. | ||
| 地址 | Oberkochen DE | ||