| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas concentration measuring system and method capable of measuring a gas of a low-concentration sterile chemical with high accuracy.SOLUTION: A gas concentration measuring system 1 comprises: a three-way valve 11 including a gas concentration measuring instrument 13 which measures concentration of a measuring target gas for sterilizing the inside of an isolator 20 via a piping 10, an input end P11 which is provided on the isolator 20 side of the piping 10 and to which the isolator 20 is connected, an input end P12 to which a purge gas PG is input, and an output end P13 which selectively communicates with any one of the input end P11 and the input end P12; and a three-way valve 12 including an output end P22 which is provided on the gas concentration measuring instrument 13 side of the piping 10 and to which the gas concentration measuring instrument 13 is connected, an output end P23 to which the purge gas PG is output, and an input end P21 which is connected to the output end P13 of the three-way valve 11 and selectively communicates with any one of the output end P22 and the output end P23.SELECTED DRAWING: Figure 1 |
