| 发明名称 |
CVD APPARATUS |
| 摘要 |
PURPOSE:To achieve the evenness of susceptor temperature by making the shoulder part of pedestals in contact with susceptors thinner in thickness toward the circumferential direction. |
| 申请公布号 |
JPS52136572(A) |
申请公布日期 |
1977.11.15 |
| 申请号 |
JP19760053457 |
申请日期 |
1976.05.10 |
| 申请人 |
MATSUSHITA ELECTRONICS CORP |
发明人 |
YAMANAKA ITARU |
| 分类号 |
C30B25/12;C23C16/44;C23C16/458;C23C16/46;H01L21/205;H01L21/31 |
主分类号 |
C30B25/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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