发明名称 DEEP BURIED LAYERS FOR SEMICONDUCTOR DEVICES
摘要 <p>1493824 Semiconductor devices GENERAL ELECTRIC CO 28 Oct 1974 [30 Oct 1973] 46446/74 Heading H1K [Also in Division B1] A metal layer 22 is located entirely within a semiconductor body 10 by a thermomigration process whereby a mass of a melt comprising the metal and the semiconductor material migrates into the body 10 from a (preferably recessed) surface 12 thereof along the direction of an increasing temperature gradient, leaving behind it a "trail" 24 of recrystallized semiconductor material doped with the metal. The recrystallized region 24 may be of the same or opposite conductivity type to the body 10, and may also allegedly be intrinsic. Semiconductor materials referred to are Si, Ge, SiC, GaAs and other III-V compounds, and II-VI compounds, and suitable metals are Al, Ga, In, Sn/Sb alloy, Sn, Pb, Au or Pt. After cooling to solidify the metal layer 22 a further annealing step is preferably performed to relieve strain around the layer 22. For a (111) oriented body 10 the layer 22 migrates as a triangular (111) platelet with boundaries in (112) planes. For a (100) oriented body 10 the migrating droplet takes a pyramidal form with four leading (111) faces and a trailing (100) face. Other possible orientations are described, including some in which the originally deposited metal is a wire oriented along a particular crystal axis.</p>
申请公布号 CA1021067(A) 申请公布日期 1977.11.15
申请号 CA19740212556 申请日期 1974.10.29
申请人 GENERAL ELECTRIC COMPANY 发明人 CLINE, HARVEY E.;ANTHONY, THOMAS R.
分类号 C30B13/02;C30B13/06;H01L21/00;H01L21/208;H01L21/24;H01L21/285;H01L21/306;H01L21/74;H01L29/06 主分类号 C30B13/02
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