发明名称 ARRAYING METHOD FOR SEMICONDUCTOR PELLETS
摘要 <p>PURPOSE:To obtain highly positioned pellet configuration by holding the circumferential edges of a flexible sheet affixed thereto with a multiplicity of diced semiconductor pellets and stretching said sheet with a heting body after evenly heating the sheet by flowing hot air.</p>
申请公布号 JPS52135666(A) 申请公布日期 1977.11.12
申请号 JP19760052976 申请日期 1976.05.10
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 KATAOKA HIROSHI
分类号 H01L21/67;H01L21/301;H01L21/68;H01L21/78 主分类号 H01L21/67
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