ION SOURCE UNIT,申请号JP19760049951-传众专利搜索

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发明名称	ION SOURCE UNIT
摘要
申请公布号	JPS52134492(A)	申请公布日期	1977.11.10
申请号	JP19760049951	申请日期	1976.05.04
申请人	HITACHI LTD	发明人	TOKIKUCHI KATSUMI;SAKUMICHI KUNIYUKI;KOIKE HIDEKI
分类号	H01J37/08;H01J3/04;H01J27/02;H01J37/05;H01J49/10;H05H7/08	主分类号	H01J37/08
代理机构		代理人
主权项
地址

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