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发明名称
VERFAHREN ZUM HERSTELLEN MEHRERER TRANSISTOREN AUS EINER HALBLEITERSCHEIBE
摘要
申请公布号
DE2201833(B2)
申请公布日期
1977.11.10
申请号
DE19722201833
申请日期
1972.01.15
申请人
发明人
分类号
G01R31/26;H01L21/66;H01L29/10;(IPC1-7):H01L21/78
主分类号
G01R31/26
代理机构
代理人
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