发明名称 HALBLEITER-MESSUMFORMER
摘要 A semiconductor transducer comprises a semiconductor strain gauge composed of a mono-crystalline semiconducting material and a strain sensing region formed in a first main surface of the mono-crystalline semiconducting material, and a strain measuring member coupled to the semiconductor strain gauge through an alloy material. An electrical insulating layer is attached to a second main surface of the mono-crystalline semiconducting material which is coupled to the strain measuring member through the alloy material. The insulating layer is extended to a side surface of the mono-crystalline semiconducting material thereby to cover the same side.
申请公布号 DE2717052(A1) 申请公布日期 1977.11.10
申请号 DE19772717052 申请日期 1977.04.18
申请人 HITACHI,LTD. 发明人 KURIHARA,YASUTOSHI;KOSUGI,TETUO;KAGAMI,TERUYUKI;SHIMADA,SATOSHI;MATSUDA,YASUMASA;YAMADA,KAZUJI
分类号 G01B7/16;G01L1/22;G01L9/00;H01L29/84;(IPC1-7):H01L29/84;G01D5/18;G01L9/04 主分类号 G01B7/16
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