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发明名称
SEMI-CONDUCTOR DIFFUSION FURNACE COMPONENTS
摘要
申请公布号
GB1491118(A)
申请公布日期
1977.11.09
申请号
GB19750045521
申请日期
1975.10.31
申请人
NORTON CO
发明人
分类号
C04B35/565;C04B35/573;C04B41/50;C04B41/85;C30B31/10;C30B31/14;H01L21/22;(IPC1-7):H01L21/00;F27D3/12;H01L21/68;B22F3/26
主分类号
C04B35/565
代理机构
代理人
主权项
地址
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