GAS-TIGHT CONNECTION AND METHOD FOR PRODUCING SAME

摘要

1396660 Fusing glass to silicon or silicon carbide SIEMENS AG 7 March 1973 [21 June 1972] 11139/73 Heading C1M [Also in Divisions F4 and H1] A component of crystalline silicon or crystalline silicon carbide is fused to a body of glass to form a gas-tight connection, the glass having a mean linear coefficient of thermal expansion (over the range 0-300‹ C.) which differs from that of the silicon (25 x 10-7/deg. C.) or the silicon carbide (60 x 10-7/deg. C.) by not more than Œ20%. The silicon or silicon carbide component 1 (Fig. 1) and the glass component 2 may both be tubular. The components may be joined at zone 3 by heat-fusion at, e.g. 900-1100‹ C. by an oxidizing flame 18 or using electricallygenerated heat. The glass may be a borosilicate or aluminoborosilicate. The silicon or silicon carbide component may be coated with a layer of glass before fusion to the glass component, the coating glass having the same composition as the component. In particular embodiments, a silicon envelope 36 is fused to glass base 37 in forming an infra-red lamp (Fig. 9); a silicon or silicon carbide tube is fused to glass components to constitute a heat-exchange element in a device for cooling chemicallyaggressive liquids (Fig. 7, not shown); and silicon or silicon carbide tubes are fused to glass in apparatus for the diffusion doping of semiconductor wafers (Fig. 8, not shown).