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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS52131462(A)
申请公布日期
1977.11.04
申请号
JP19760048881
申请日期
1976.04.28
申请人
MITSUBISHI ELECTRIC CORP
发明人
HIRANO HIROSHI
分类号
H01L21/76;H01L21/31;H01L21/316
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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