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发明名称
ELECTRON BEAM EXPOSING DEVICE
摘要
申请公布号
JPS52130570(A)
申请公布日期
1977.11.01
申请号
JP19760048100
申请日期
1976.04.27
申请人
NIPPON ELECTRON OPTICS LAB;RIKAGAKU KENKYUSHO
发明人
GOTOU HIDEKAZU;SOUMA TAKASHI;IDESAWA MASANORI;TAKAYANAGI SHINJI
分类号
H01L21/027;H01L21/26
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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